微纳传感器与系统，微流控芯片系统，MEMS加工工艺与传感器封装，微弱信号检测与仪表技术

每年招生硕士和直博生4-5名

080903-微电子学与固体电子学
080920-生物电子学
085208-电子与通信工程

1. 基于微纳米技术的传感器、执行器与系统
2. MEMS加工技术与封装
3. 微流控芯片系统 
4. 信号检测与仪表技术

1998-03--2002-11   清华大学   博士
1995-09--1998-03   吉林大学   硕士
1991-09--1995-07   吉林大学   学士

2006年在英国皇家学会资助下，赴英国卢瑟福国家实验室和牛津大学工程系开展有关微流体芯片的合作研究；
2009年在院高级访问学者的资助下，赴美国加州大学伯克利（Berkeley）分校传感器与执行器中心（BSAC）从事有关纳米发电机的合作研究。
                           

科学前沿进展名家系列讲座III
前沿电子学研究
微流控芯片系统
本科生毕业设计（电子信息工程）
科研实践Ⅰ
科研实践Ⅱ
射频集成电路设计与分析
CMOS模拟集成电路设计与分析
MEMS接口电路
传感器网络与模式识别系列讲座
传感器网络系列讲座
物联网系列讲座

   

[1] 祁志美, 董志飞, 熊林森, 岳研, 蔡宸, 王军波. 一种声学温度传感器及温度测量方法. 202211430631.8, 2022-11-15.

[2] 谢波, 余宗泽, 鲁毓岚, 薛涵, 陈德勇, 王军波. 敏感芯体和传感器. 202210974384.1, 2022-08-15.

[3] 王军波, 姚佳辉, 程超, 陈德勇, 谢波, 鲁毓岚, 薛涵, 余宗泽. 一种基于共晶键合工艺的谐振式差压传感器的设计制作方法. 202210814306.5, 2022-07-12.

[4] 陈德勇, 谢波, 秦佳新, 鲁毓岚, 尉洁, 王军波. 一种差分刚度扰动模态局域化的高灵敏微压传感器. 20221075922.6, 2022-06-30.

[5] 陈健, 黄旭琨, 刘岩, 梁红雁, 王棵, 陈德勇, 王军波. 基于非压缩通道的单细胞生物物理特性检测装置及方法. 202210321553.1, 2022-03-25.

[6] 陈德勇, 尉洁, 王军波, 鲁毓岚, 谢波. 一种具有高Q值的硅谐振式高压传感器及其制备方法. 202210224116.8, 2022-03-09.

[7] 陈健, 梁红雁, 陈骁, 陈德勇, 王军波. 一种基于阻抗信号及荧光成像的细胞特征检测方法和装置. 20211010815.7, 2022-01-28.

[8] 王军波, 孟庆港, 陈德勇, 鲁毓岚, 谢波. 基于SOI的电阻中心放置的压阻式压力传感器. CN: CN113758613A, 2021-12-07.

[9] 王军波, 段语默, 陈德勇, 许超, 齐文杰. MEMS电化学振动传感器四电极一体化敏感电极及其制造方法. CN: CN113739901A, 2021-12-03.

[10] 陈德勇, 陈明惟, 王军波, 钟安详, 段语默, 刘博文, 梁天, 齐文杰. 一种电化学角加速度传感器的封装方法. CN: CN113687102A, 2021-11-23.

[11] 王军波, 程超, 姚佳辉, 陈德勇, 鲁毓岚. 一种集成温度传感器的谐振式差压传感器及其制备方法. CN: CN113686483A, 2021-11-23.

[12] 王军波, 梁天, 陈德勇, 刘博文, 许超, 齐文杰, 佘旭. 一种电化学敏感电极、制作方法及应用其的角加速度传感器. CN: CN113687101A, 2021-11-23.

[13] 陈德勇, 陈明惟, 王军波, 刘博文, 梁天, 齐文杰, 钟安详, 段语默. 一种基于硅导电的MEMS电化学振动传感器敏感电极及其制造方法. CN: CN113671213A, 2021-11-19.

[14] 陈健, 张婷, 陈德勇, 王军波. 基于光源调制的高分辨率单细胞蛋白定量检测方法. CN: CN113670874A, 2021-11-19.

[15] 王军波, 钟安祥, 陈健, 陈德勇, 段语默, 陈明惟, 梁天, 刘博文, 许超, 齐文杰, 佘旭. 一种敏感器件、电化学矢量水听器. CN: CN113654644A, 2021-11-16.

[16] 陈健, 梁红雁, 张毅, 谭惠文, 陈德勇, 王军波. 基于电学及荧光信号的微流控芯片和血细胞分析装置. CN202010226537.5, 2021-10-26.

[17] 陈健, 梁红雁, 张毅, 谭惠文, 陈德勇, 王军波. 细胞核电学性能检测装置及方法. CN202010073004.8, 2021-10-12.

[18] 陈健, 张婷, 陈德勇, 王军波. 基于光源调制的高分辨率单细胞蛋白定量检测装置及方法. CN202110952702.X, 2021-08-19.

[19] 王军波, 张森, 陈德勇, 鲁毓岚, 谢波, 郑宇. 谐振式微压传感器及其制备方法. CN: CN113091989A, 2021-07-09.

[20] 陈德勇, 尉洁, 王军波, 鲁毓岚, 谢波, 项超. 一种谐振式高压传感器及其制作方法. CN: CN113091984A, 2021-07-09.

[21] 杜利东, 许立锐, 陈贤祥, 王鹏, 方震, 王军波, 太惠玲, 蒋亚东. 复合柔性三维压力监测阵列的柔性超声换能阵列及装置. CN: CN113092595A, 2021-07-09.

[22] 陈健, 梁红雁, 张毅, 谭惠文, 陈德勇, 王军波. 一种细胞及细胞核生物电学特性检测装置及方法. CN202110198721.8, 2021-06-25.

[23] 陈德勇, 尉洁, 王军波, 鲁毓岚, 谢波. 基于谐振器的真空度检测方法、系统及装置. CN: CN113008453A, 2021-06-22.

[24] 王军波, 刘博文, 陈德勇, 许超, 梁天, 齐文杰, 佘旭. 基于小型化平面电极的电化学角加速度传感器. CN: CN112986619A, 2021-06-18.

[25] 陈健, 梁红雁, 张毅, 谭惠文, 陈德勇, 王军波. 基于电学信号的微流控芯片和血细胞分析装置及方法. CN202010226539.4, 2021-05-15.

[26] 陈健, 张毅, 谭惠文, 梁红雁, 陈德勇, 王军波. 检测细胞膜电势的装置及其检测方法. CN: CN112683950A, 2021-04-20.

[27] 王军波, 梁天, 陈德勇, 刘博文, 许超, 齐文杰, 佘旭. 一种基于磁流体反馈的MEMS电化学角加速度传感器及方法. CN: CN112666367A, 2021-04-16.

[28] 王军波, 程超, 李亚东, 陈德勇, 鲁毓岚. 一种谐振式差压传感器和补偿方法. CN: CN112611501A, 2021-04-06.

[29] 杜利东, 许立锐, 陈贤祥, 王鹏, 方震, 王军波, 太惠玲, 蒋亚东. 基于超声探头与皮肤相对位移的自适应超声波束合成方法. CN: CN112515702A, 2021-03-19.

[30] 陈德勇, 李亚东, 程超, 谢波, 王军波. 高灵敏度谐振式差压传感器及其制备方法. CN: CN112461438A, 2021-03-09.

[31] 太惠玲, 段再华, 蒋亚东, 方震, 王军波, 黄琦. 基于双面微结构电极和纸张的柔性压力传感器及制备方法. CN: CN112179530A, 2021-01-05.

[32] 陈健, 张毅, 谭惠文, 梁红雁, 陈德勇, 王军波. 基于压缩通道的单细胞生物电参量检测装置及检测方法. CN: CN111596134A, 2020-08-28.

[33] 王军波, 刘博文, 陈德勇, 许超, 梁天, 齐文杰, 郑希宸, 佘旭. MEMS一体化平面电极及含其的电化学角加速度传感器. CN: CN111474575A, 2020-07-31.

[34] 陈健, 刘力行, 张婷, 杨泓雨, 陈德勇, 王军波. 基于立体均匀聚焦激光的单细胞蛋白定量检测系统及方法. CN: CN111323403A, 2020-06-23.

[35] 王军波, 朱林, 陈德勇, 谢波. 一种硅谐振压力传感器的补偿方法. CN: CN106932125A, 2017-07-07.

[36] 王军波, 魏秋旭, 赵明, 陈德勇, 陈健. 一种植入式无线无源颅内压监测系统. CN: CN105832327A, 2016-08-10.

2008年入选北京市科技新星计划（A类）

2015年“高性能MEMS电化学地震检波器”获第十七届中国国际工业博览会创新奖（第1完成人）

2017年“高精度硅谐振压力传感器关键技术及应用”获得中国电子学会技术发明二等奖（第1完成人）

2017年“基于微流控芯片的单细胞电学特性高通量检测技术及应用”获得中国分析测试技术协会科学技术（CAIA）三等奖（第1完成人）

2017年“高精度硅基MEMS谐振式压力传感器”入选第12届中国半导体创新产品与技术（第1完成人）

2018年 获得国家杰出青年科学基金

2018年 获得中国科学院优秀导师奖

2020年 获得中国仪器仪表学会技术发明二等奖

2022年 获得中国产业发展促进会杰出贡献奖

   

[1] Gao, Fupeng, Liu, Chunxiu, Zhang, Lichao, Liu, Tiezhu, Wang, Zheng, Song, Zixuan, Cai, Haoyuan, Fang, Zhen, Chen, Jiamin, Wang, Junbo, Han, Mengdi, Wang, Jun, Lin, Kai, Wang, Ruoyong, Li, Mingxiao, Mei, Qian, Ma, Xibo, Liang, Shuli, Gou, Guangyang, Xue, Ning. Wearable and flexible electrochemical sensors for sweat analysis: a review. MICROSYSTEMS & NANOENGINEERINGnull. 2023, 9(1): http://dx.doi.org/10.1038/s41378-022-00443-6.
[2] Chen, Xiao, Wang, Minruihong, Liu, Yan, Liu, Mingyue, Chen, Deyong, Chen, Bo, Wang, Junbo, Chen, Jian. Interpretation of preliminary electrical data in impedance flow cytometry: numerical simulation, theoretical analysis, and neural net fitting. MICROFLUIDICS AND NANOFLUIDICS[J]. 2023, 27(2): [3] 张婷, 刘力行, 卫元晨, 高驰远, 马良良, 高梦鸽, 赵晓甦, 王衣祥, 陈德勇, 孙力超, 王军波, 陈健. A microfluidic flow cytometry enabling high-throughput characterization of single-cell impedance and imaging based on constrictional microchannels coupled with deep neural networks. Transducers 2023null. 2023, [4] 梁天, 孙振宇, 胡林涛, 朱茂琦, 张明博, 刘青华, 陈健, 陈德勇, 王军波. Micro-Electrochemical Rotational Vibration Sensor with SOI-Based Microelectrodes Used for Seismic Monitoring. IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT[J]. 2023, [5] 尉洁, 余宗泽, 钱攀, 鲁毓岚, 陈健, 王军波, 陈德勇. A RESONANT HIGH-PRESSURE SENSOR WITH AN H-CAVITY. Transducers 2023null. 2023, [6] 房庭轩, 黄旭琨, 陈骁, 陈德勇, 王军波, 陈健. Segmentation, feature extraction and classification of leukocytes leveraging deep neural networks. Microtas 2023null. 2023, [7] Qinggang Meng, Junbo Wang, Deyong Chen, Jian Chen, Bo Xie, Yulan Lu. A novel evolutionary method for parameter-free MEMS structural design and its application in piezoresistive pressure sensors. MICROSYSTEMS & NANOENGINEERING. 2023, 9: https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10600208/.
[8] Chen, Siyuan, Qin, Jiaxin, Lu, Yulan, Xie, Bo, Wang, Junbo, Chen, Deyong, Chen, Jian. An All-Silicon Resonant Pressure Microsensor Based on Eutectic Bonding. MICROMACHINES[J]. 2023, 14(2): http://dx.doi.org/10.3390/mi14020441.
[9] 孙振宇, 梁天, 胡林涛, 朱茂琦, 张明博, 王军波, 陈德勇, 陈健. ELECTROCHEMICAL SEISMOMETER BASED ON ONE SINGLE SILICON CHIP WITH FOUR ELECTRODES. Transducers 2023null. 2023, [10] Yu, Jie, Yu, Zongze, Lu, Yulan, Xie, Bo, Chen, Deyong, Wang, Junbo, Chen, Jian. A Resonant High-Pressure Microsensor Based on the Vertical Dual Resonators With Oil-Filled Isolated Structure. IEEE ELECTRON DEVICE LETTERS[J]. 2023, 44(3): 508-511, http://dx.doi.org/10.1109/LED.2023.3237272.
[11] 姚佳辉, 程超, 薛涵, 李星雨, 鲁毓岚, 谢波, 王军波, 陈德勇, 陈健. A High-Sensitivity Resonant Differential Pressure Microsensor Based on Wafer-Level Eutectic Bonding. IEEE Transactions on Electron Devices[J]. 2023, [12] 谭惠文, 陈骁, 黄旭琨, 陈德勇, 秦绪珍, 王军波, 陈健. Electrical micro flow cytometry with LSTM and its application in leukocyte differential. Cytometry Part A[J]. 2023, [13] 黄旭琨, 陈骁, 谭惠文, 王闵瑞虹, 李益民, 卫元晨, 张捷, 陈德勇, 李玥莹, 王军波, 陈健. Advance of microfluidic flow cytometry enabling high-throughput characterization of single-cell electrical and structural properties. Cytometry Part A[J]. 2023, [14] 张婷, 刘力行, 卫元晨, 高驰远, 马良良, 高梦鸽, 赵晓甦, 王衣祥, 陈德勇, 孙力超, 王军波, 陈健. Application of quantitative analysis of single-cell proteins in leukemia gating, tumor classification and hierarchy of cancer stem cells. MicroTASnull. 2023, [15] Liu, Tiezhu, Gou, Guangyang, Gao, Fupeng, Yao, Pan, Wu, Haoyu, Guo, Yusen, Yin, Minghui, Yang, Jie, Wen, Tiancai, Zhao, Ming, Li, Tong, Chen, Gang, Sun, Jianhai, Ma, Tianjun, Cheng, Jianqun, Qi, Zhimei, Chen, Jiamin, Wang, Junbo, Han, Mengdi, Fang, Zhen, Gao, Yangyang, Liu, Chunxiu, Xue, Ning. Multichannel Flexible Pulse Perception Array for Intelligent Disease Diagnosis System. ACS NANO. 2023, http://dx.doi.org/10.1021/acsnano.2c11897.
[16] 胡林涛, 梁天, 孙振宇, 朱茂琦, 张明博, 王军波, 陈德勇, 陈健. A THREE-AXIS CO-OSCILLATING VECTOR HYDROPHONE BASED ON MEMS ELECTROCHEMISTRY. Transducers 2023null. 2023, [17] 薛涵, 姚佳辉, 程超, 余宗泽, 鲁毓岚, 谢波, 王军波, 陈德勇, 陈健. A MEMS RESONANT PRESSURE SENSOR BASED ON CAVITY-SOI. Transducers 2023null. 2023, [18] Chiyuan Gao, Ting Zhang, Yuanchen Wei, Qinghua Liu, Liangliang Ma, Mengge Gao, Xiaosu Zhao, Yixiang Wang, Deyong Chen, Lichao Sun, Junbo Wang, Jian Chen. Development of a Microfluidic Flow Cytometer witha Uniform Optical Field (Uni-μFCM) Enabling Quantitative Analysisof Single-Cell Proteins and Its Applications in Leukemia Gating, TumorClassification, and Hierarchy of Cancer Stem Cells. ACS SENSORS. 2023, 8(9): 3498-3509, https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10521140/.
[19] Dong, Zhifei, Xiong, Linsen, Yue, Yan, Cai, Chen, Wang, Junbo, Qi, Zhi-mei. A speakerless acoustic thermometer. MEASUREMENT SCIENCE AND TECHNOLOGY[J]. 2023, 34(5): http://dx.doi.org/10.1088/1361-6501/acbab2.
[20] 梁天, 张明博, 胡林涛, 孙振宇, 朱茂琦, 陈德勇, 王军波, 陈健. HIGH-SENSITIVITY ELECTROCHEMICAL ANGULAR ACCELEROMETER RELYING ON SOI-BASED MICROELECTRODEs. Transducers 2023null. 2023, [21] Zhang, Ting, Chen, Xiao, Chen, Deyong, Wang, Junbo, Chen, Jian. Development of constrictional microchannels and the recurrent neural network in single-cell protein analysis. FRONTIERS IN BIOENGINEERING AND BIOTECHNOLOGY[J]. 2023, 11: http://dx.doi.org/10.3389/fbioe.2023.1195940.
[22] Tan, Huiwen, Chen, Xiao, Huang, Xukun, Chen, Deyong, Qin, Xuzhen, Wang, Junbo, Chen, Jian. Development of Microfluidic Impedance Flow Cytometry Enabling the Quantification of Intrinsic Single-Cell Bio-Dielectric Parameters Based on Constrictional Microchannel, Numerical Simulation, and Neural Network. IEEE SENSORS JOURNAL[J]. 2023, 23(2): 1024-1032, http://dx.doi.org/10.1109/JSEN.2022.3226781.
[23] 谭惠文, 陈骁, 黄旭琨, 陈德勇, 秦绪珍, 王军波, 陈健. Impedance flow cytometry based on constrictional microchannels and deep learning. MicroTASnull. 2023, [24] Chao Cheng, Yao, Jiahui, Han Xue, Yulan Lu, Junbo Wang, Chen, Deyong. A MEMS Resonant Differential Pressure Sensor with High Accuracy by Integrated temperature sensor and static pressure sensor. Ieee Electron Device Letters[J]. 2022, [25] Duan, Yumo, Zhong, Anxiang, Lu, Yulan, Chen, Jian, Chen, Deyong, Wang, Junbo. A MEMS Electrochemical Seismometer Based on the Integrated Structure of Centrosymmetric Four Electrodes. MICROMACHINES[J]. 2022, 13(3): http://dx.doi.org/10.3390/mi13030354.
[26] Zhang, Sen, Zheng, Yu, Lu, Yulan, Xie, Bo, Chen, Deyong, Wang, Junbo, Chen, Jian. Reduction of Temperature Sensitivity for Resonant Micro-Pressure Sensor Using Glass-Silicon Coupling Wafer Packaging. IEEE SENSORS JOURNAL[J]. 2022, 22(7): 6410-6417, http://dx.doi.org/10.1109/JSEN.2022.3152922.
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[178] 刘吉利, 陈德勇, 王军波. Control System for an Electromagnetic Vibrating Ring Gyroscope. 中国微米纳米技术学会第十五届学术年会null. 2013, http://159.226.65.12/handle/80137/10012.
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[180] Deyong Chen, Guangbei Li, Junbo Wang, Jian Chen, Wentao He, Yunjie Fan, Tao Deng, Peng Wang. A micro electrochemical seismic sensor based on MEMS technologies. SENSORS & ACTUATORS: A. PHYSICAL. 2013, 85-89, http://dx.doi.org/10.1016/j.sna.2012.12.041.
[181] Zhao, Yang, Chen, Deyong, Li, Hao, Luo, Yana, Deng, Bin, Huang, SongBin, Chiu, TzuKeng, Wu, MinHsien, Long, Rong, Hu, Hao, Wang, Junbo, Chen, Jian. A microfluidic system enabling continuous characterization of specific membrane capacitance and cytoplasm conductivity of single cells in suspension. BIOSENSORS & BIOELECTRONICS[J]. 2013, 43: 304-307, http://dx.doi.org/10.1016/j.bios.2012.12.035.
[182] Yan Long Shang, Jun Bo Wang, De Yong Chen, Qiang Shi, Guang Bei Li. Closed-Loop Control of a SOI-MEMS Resonant Accelerometer with Electromagnetic Excitation. KEY ENGINEERING MATERIALS. 2012, 1663: [183] 焦海龙, 陈德勇, 王军波, 李玉欣, 李浩. 基于谐振式MEMS传感器的仪表开发关键技术. 仪表技术与传感器[J]. 2012, 26-28, http://lib.cqvip.com/Qikan/Article/Detail?id=40979577.
[184] 王军波. Micro-machined Electrochemical Seismic Sensor with Interdigital Electrodes. 2012, [185] Guangbei Li, Deyong Chen, Junbo Wang, Chen Jian, Wentao He, Yunjie Fan, Tao Deng. A MEMS based Seismic Sensor using the Electrochemical Approach. PROCEDIA ENGINEERING. 2012, http://kns.cnki.net/KCMS/detail/detail.aspx?QueryID=1&CurRec=1&recid=&FileName=SJES6CE918E8A4021D84AE1B50FE34723F05&DbName=SJES_02&DbCode=SJES&yx=&pr=&URLID=&bsm=.
[186] Wang, Junbo, Shang, Yanlong, Chen, Jian, Sun, Zhenguo, Chen, Deyong. Micro-machined resonant out-of-plane accelerometer with a differential structure fabricated by silicon-on-insulator-MEMS technology. MICRO & NANO LETTERS[J]. 2012, 7(12): 1230-1233, https://www.webofscience.com/wos/woscc/full-record/WOS:000316949900021.
[187] Wen Tao He, De Yong Chen, Guang Bei Li, Jun Bo Wang. Low Frequency Electrochemical Accelerometer with Low Noise Based on MEMS. KEY ENGINEERING MATERIALS. 2012, 1663: [188] Yu Xin Li, De Yong Chen, Jun Bo Wang. Low Temperature Wafer Level Adhesive Bonding Using BCB for Resonant Pressure Sensor. KEY ENGINEERING MATERIALS. 2012, 1663: [189] Liu, Jili, Chen, Deyong, Wang, Junbo. Regulating parameters of electromagnetic micromachined vibrating ring gyroscope by feedback control. MICRONANOLETTERS[J]. 2012, 7(12): 1234-1236, [190] Shang, Yanlong, Wang, Junbo, Tu, Sheng, Liu, Lei, Chen, Deyong. Z-axis differential silicon-on-insulator resonant accelerometer with high sensitivity. MICRO & NANO LETTERS[J]. 2011, 6(7): 519-522, http://ir.sim.ac.cn/handle/331004/109051.
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[193] 涂晟, 王军波, 商艳龙, 陈德勇. 高灵敏度谐振式微加速度传感器的设计与制作. 传感技术学报[J]. 2011, 24(8): 1114-1117, http://lib.cqvip.com/Qikan/Article/Detail?id=39136833.
[194] 王军波. MEMS应变式结冰传感器及其检测方法. 传感技术学报. 2011, [195] 王军波. Z-axis Differential SOI-resonant accelerometer with high sensitivity. Micro and Nano Letters. 2011, [196] Wu, Shuanghong, Li, Wenlian, Chu, Bei, Lee, C S, Su, Zisheng, Wang, Junbo, Ren, Qingjiang, Hu, Zhizhi, Zhang, Zhiqiang. Visible-blind ultraviolet sensitive photodiode with high responsivity and long term stability. APPLIED PHYSICS LETTERS[J]. 2010, 97(2): http://ir.ciomp.ac.cn/handle/181722/26209.
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（1） 英文专著一章节, Mechanical Properties of Single Cells: Label Free Biomarkers for Evaluation of Cell Status, Springer-Verlag GmbH., 2015-07, 第 5 作者
（2） 英文专著一章节, Micro Electro Mechanical Systems: A micromachined silicon resonant pressure sensor, Springer, 2017-08, 第 1 作者
（3） 英文专著1章节, Methods in Molecular Biology : Single-Cell Protein Assays--A Review, Springer International Publishing, 2017-08, 第 2 作者

   

（ 1 ） 电化学地震检波器研制, 负责人, 国家任务, 2011-08--2014-12
（ 2 ） 无线无源胃肠压力传感器, 负责人, 国家任务, 2012-01--2014-12
（ 3 ） 骨细胞在基于微流控技术重建的体外微环境中的代谢和功能研究, 负责人, 国家任务, 2013-01--2015-12
（ 4 ） 基于细胞机械/电子特性高通量同时表征的肿瘤细胞检测研究, 参与, 国家任务, 2013-01--2015-12
（ 5 ） MicroCare, 负责人, 其他任务, 2010-07--2014-07
（ 6 ） 面向潜在抑郁风险预警的生物、心理信息获取方法及关键技术, 负责人, 国家任务, 2014-01--2018-09
（ 7 ） 基于MEMS技术的宽带电化学地震检波器研制, 负责人, 国家任务, 2013-09--2018-09
（ 8 ） 海底地震仪MEMS电化学宽带地震检波器研制, 参与, 国家任务, 2014-01--2016-12
（ 9 ） 非侵入式无线无源MEMS 眼压传感器研究, 参与, 国家任务, 2014-01--2017-12
（ 10 ） 肿瘤细胞生物物理/化学特性高通量综合检测方法研究, 负责人, 国家任务, 2015-01--2019-12
（ 11 ） 单细胞固有电学/力学特性高通量检测分析仪研制, 负责人, 中国科学院计划, 2015-01--2016-12
（ 12 ） 电化学地震动传感器研究, 负责人, 国家任务, 2015-01--2016-12
（ 13 ） 基于柔性衬底的无线无源腹主动脉瘤MEMS压力传感器研究, 参与, 地方任务, 2015-01--2017-12
（ 14 ） 硅谐振压力传感器, 负责人, 企业委托, 2016-01--2017-12
（ 15 ） 高精度压力传感器, 负责人, 国家任务, 2017-01--2018-12
（ 16 ） 低频地震检波器, 负责人, 国家任务, 2017-01--2018-12
（ 17 ） 深海甚宽频带MEMS电化学地震检波器, 参与, 国家任务, 2016-09--2020-08
（ 18 ） 面向肿瘤异质性的单细胞蛋白检测新方法研究, 参与, 中国科学院计划, 2016-08--2020-12
（ 19 ） 高精度硅谐振压力传感器批量化制造技术, 负责人, 中国科学院计划, 2018-01--2019-12
（ 20 ） MEMS传感器, 负责人, 国家任务, 2019-01--2023-12
（ 21 ） 甚低频新型微纳传感器, 负责人, 国家任务, 2018-10--2019-12
（ 22 ） 地震检波器, 负责人, 中国科学院计划, 2019-01--2023-12
（ 23 ） 高精度硅基谐振式压力传感器, 参与, 国家任务, 2019-06--2022-07
（ 24 ） 压力传感器批量化自动标定系统, 负责人, 中国科学院计划, 2019-01--2019-12
（ 25 ） 压力传感器, 负责人, 国家任务, 2020-01--2021-12
（ 26 ） 装备健康状态监测复合集成微传感器系统研究, 负责人, 国家任务, 2020-01--2023-12
（ 27 ） 数字压力传感器, 负责人, 国家任务, 2020-11--2022-12
（ 28 ） 深海新型微纳传感器技术, 负责人, 国家任务, 2020-08--2021-12
（ 29 ） 高端MEMS传感器关键技术, 负责人, 中国科学院计划, 2021-01--2023-12
（ 30 ） 微纳传感技术, 参与, 国家任务, 2022-01--2026-12
（ 31 ） 工业测控高精度硅基压力传感器关键技术, 负责人, 国家任务, 2021-11--2024-10

（1）谐振式微压传感器的过载保护设计   2021大气/气象测量及传感器论坛   王军波   2021-09-15
（2）一种低应力组装的谐振式差压传感器   2021大气/气象测量及传感器论坛   2021-09-15
（3）一种基于梳齿音叉结构的硅谐振式高压传感器设计   2021大气/气象测量及传感器论坛   王军波   2021-09-15
（4）高精度气压传感器及其在气象监测中的应用   2021大气/气象测量及传感器论坛   2021-09-15
（5）基于三传感器冗余优选算法的高精度气压计   2021大气/气象测量及传感器论坛   2021-09-15
（6）高精度硅谐振压力传感器关键技术及应用   2021大气/气象测量及传感器论坛   2021-09-15
（7）A Piezoresistive Pressure Microsensor Based on Simplified Fabrication Processes   2021-06-21
（8）A Resonant Differential Pressure Microsensor With a Stress Isolation Layer   2021-06-21
（9）A Resonant High Pressure Sensor Based on Dual Cavities Design   王军波   2021-06-21
（10）A Resonant Differential Pressure Sensor Based on Bulk Silicon Technology   2021-06-21
（11）A MICROFLUIDIC FLOW CYTOMETER COMPOSED OF DOUBLE T-TYPE CONSTRICTION CHANNEL WITH PREDEFINED FLUORESCENCE DETECTION WINDOW, ENABLING HIGH-THROUGHPUT CHARACTERIZATION OF INTRINSIC SINGLE-CELL STRUCTURAL AND ELECTRICAL PARAMETERS   2021-06-20
（12）A Micromachined Resonant Low-Pressure Sensor Using an Island-Diaphragm Structure   2021-06-06
（13）A Resoant Micro-Pressure With Glass-on-Silicon Wafer Packaging   2021-06-06
（14）A RESONANT DIFFERENTIAL PRESSURE MICROSENSOR WITH COMPENSATIONS OF TEMPERATURE AND STATIC PRESSURE   2021-06-06
（15）A RESONANT HIGH-PRESSURE SENSOR WITH HIGH STRENGTH DESIGN   2021-06-06
（16）The Design and Fabrication of the High Integrated Sensitive Electrodes by Adopting the Anodic Bonding Technology for the Electrochemical Seismic Sensors   2021-03-15
（17） A MEMS Based Electrochemical Angular Vibration Sensor    2020-10-16
（18）MEMS Based Triaxial Electrochemical Seismometer   2020-10-16
（19）Constriction Channel Based Microfluidic System of Quantifying Single-Cell Cytoplasmic Viscosity, Cytoplasmic Conductivity and Specific Membrane Capacitance    2020-10-04
（20）High-Throughput Quantification of Single-Cell Cortical Tension Using Mutiple Constriction Channels    2020-10-04
（21）一种基于共晶键合的谐振式差压传感器   第十六届全国敏感元件与传感器学术会议   2020-09-19
（22）A constriction channel based microfluidic flow cytometry enabling highthroughput quantification of multiple types of intracellular proteins in single cells    2019-06-28
（23）An electrochemical microseismometer based on a new electrolyte system to improve the low-frequency performances   2019-06-28
（24）The electrochemical seismometer based on a novel designed sensing electrode for undersea exploration    2019-06-28
（25）Development of a crossing constriction channel based microfluidic cytometry enabling the high-throughput quantification of single-cell electrical phenotypes    2019-06-28
（26） A resonant pressure micro sensor based on suspended assembly    2019-06-28
（27）Development of Micro-machined Seismic Sensor and Its Application   2019-05-05
（28）高性能MEMS电化学地震检波器   鳌山海洋传感器论坛   2019-01-17
（29）基于微流控芯片的单细胞电学特性高通量检测技术及应用   中国微米纳米技术学会首届微流控技术应用创新论坛   2018-12-09
（30）高精度硅谐振MEMS压力传感器关键技术   中国机械工程学会微纳制造分会年会   2018-11-09
（31）Numerical Study of the Frequency Charateristics of the Electrochemical Seismometer   2018-10-30
（32）高精度硅基谐振式压力传感器关键技术   中国微米纳米技术2018年学术年会   2018-10-21
（33）An Analytical Method for Modelling Pull-in Effect during Anodic Bonding   2018-09-08
（34）A Double-Ended Tuning Fork Based Resonant Pressure Micro-sensor Relying on Electrostatic Excitation and Piezoresistive Detection   2018-09-08
（35）The development of micromachined electrochmeical seismometer   2018-07-15
（36）The Development of Micro-machined Based Electrochemical Seismic Sensor   2017-11-21
（37）A Force-balanced Negative Feedback Method for MEMS Based Electrochemical Seismic Sensor   2017-10-30
（38）A Monolithic Three Axial Electrochemical Seismic Sensor Based on MEMS Technology   2017-10-30
（39）Development of micromachined molecular seismometer   2017-07-18
（40）A Monolithic Three Axial Electrochemical Seismic Sensor Based on MEMS Technology   2017-06-21
（41）A high-quality resonant pressure micro sensor withthrough-silicon-via electrical interconnections   2017-06-21
（42）单细胞生物物理特性高通量检测技术   第二届“微纳传感器与系统集成技术”青年学者论坛   2017-06-17
（43）High-sensitivity Electrochemical Seismometers Relying on Parylene-based Microelectrodes   2017-04-12
（44）Reduction of the Temperature Sensitivity of Anodic Bonded Resonant Pressure Micro Sensors   2017-04-12
（45）基于微流控芯片的单细胞生物物理特性高通量检测技术   第十七届“微言大义”研讨会   王军波   2017-01-22
（46）高性能MEMS电化学地震检波器研究   第一届“微纳机械测试理论与技术基础”青年学者论坛   王军波   2016-11-25
（47）A Novel Method Based on RF Detection Enabling Wireless and Passive LC Sensing   Qiuxu Wei，Yanshuang Wang，Deyong Chen，Jian Chen，Junbo Wang   2016-10-29
（48）Effect of the Cathodes on the Characteristics of the MEMS Based Electrochemical Seismometer   Zhenyuan Sun，Deyong Chen，Junbo Wang，Jian Chen，Tao Deng，Guanglei Li   2016-10-29
（49）无线无源颅内压传感器结构设计与优化   第十四届全国敏感元件与传感器学术会议   魏秋旭(#)，王军波(*)，陈健，陈德勇，赵明   2016-10-12
（50）A System Enabling Isolation and Electrical Property Characterization of Circulating Tumour Cells   Tzu-Keng Chiu，Yang Zhao，Deyong Chen，Chia-Hsun Hsieh，Ke Wang，Wen-Pin Chou，Beiyuan Fan，Junbo Wang(*)，Jian Chen(*)，Min-Hsien Wu(*)   2016-10-09
（51）A Microfluidic System Enabling High-Throughput Single-Cell Intracellular Protein Quantification   Xiufeng Li，Beiyuan Fan，Deyong Chen，Xiaoting Zhao，Wentao Yue，Junbo Wang(*)，Jian Chen(*)   2016-10-09
（52）A 96-Well Three-Dimensional Microfluidic Wound-Healing Assay   Rui Hao，Yuanchen Wei，Feng Chen，Deyong Chen，Wei Guo(*)，Junbo Wang(*)，Jian Chen(*)   2016-10-09
（53）A MEMS Based Electrochemical Seismometer with Central Working Frequency under 1 Hz and Ultra-low Self-noise   Zhenyuan Sun(#)，Deyong Chen(*)，Jian Chen，Tao Deng，Guanglei Li，Junbo Wang(*)，，   2016-07-28
（54）The effect of elasticity coefficient on the characteristics of MEMS based electrochemical seismic sensors   Guanlei Li(#)，Junbo Wang(*)，Deyong Chen，Tao Deng，Zhenyuan Sun，Yonghao Xing，Jian Chen，   2016-07-24
（55）The Development of Micro-machined Based Electrochemical Seismic Sensor，   Junbo Wang   2016-07-24
（56）Implantable Wireless Passive Intracranial Pressure Monitoring System   Qiuxu Wei(#)，Junbo Wang(*)，Deyong Chen，Jian Chen，Ming Zhao   2016-06-25
（57）基于微流控芯片的单细胞生物物理特性高通量检测技术   王军波   2016-06-16
（58）A MEMS based electrochemical seismometer with a novel integrated sensing unit   2016-01-28
（59）A MEMS based electrochemical seismometer with a novel integrated sensing unit   Zhenyuan Sun(#)，Deyong Chen(*)，Jian Chen，Tao Deng，Guanglei Li，Junbo Wang(*)   2016-01-24
（60）海底地震仪用高性能MEMS 电化学地震检波器研制   第二届全国海洋技术学术会议   2015-11-11
（61）An electrochemical seismometer with frequency features under regulation   2015-11-01
（62）Electrochemical vibration sensor with force balance feedback system   2015-11-01
（63）The effect of electrolyte concentration on the characteristics of MEMS based electrochemical seismic sensors   2015-11-01
（64）A 384-well microfluidic wound-healing assay   2015-10-28
（65）Classification of mouse tumor samples based on specific membrane capacitance and cytoplasm conductivity of single cells   2015-10-28
（66）高精度谐振式MEMS压力传感器   第三届国际(常州)传感器技术与应用高峰论坛   2015-10-22
（67）A resonant pressure sensor integrated with self-temperature sensing   2015-10-13
（68）A differential resonant pressure micro sensor with identical sensitivity of two resonant beams   2015-10-13
（69）Real-time and high-performance blood pressure monitoring system based on LC sensors   2015-10-13
（70）The effect of elasticity coefficient on the characteristics of MEMS based electrochemical seismic sensors   2015-10-13
（71）Microfluidic platform for tumor cell characterization and classification based on specific membrane capacitance and cytoplasm conductivity   2015-08-21
（72）Microfluidic studies of vascular smooth muscle cells   2015-08-21
（73）A tubing-free microfluidic wound-healing assay quantifying vascular smooth muscle cell migrtion   2015-06-23
（74）Temperature effects on characteristics of mems based electrochemical seismic sensors for linear motion detecting   2015-06-23
（75）A self-temperature compensating barometer with dual doubly-clamped resonators   2015-06-22
（76）Micro-machined based electrochemical vibration sensor and its applications   2015-05-11
（77）A Tubing-Free Microfluidic Wound-Healing Assay Quantifying Vascular Smooth Muscle Cell Migration   第九届全国微全分析系统学术会议   卫元晨，陈峰*,张韬*,陈德勇,贾鑫*,王军波,郭伟*,陈健   2014-10-31
（78）A Constriction Channel Based T-Shape Microfluidic Platform Enabling Continuous Single-Cell Electrical Property Characterization   第九届全国微全分析系统学术会议   赵阳，陈德勇, 薛成宬,王军波,陈健   2014-10-31
（79）A Microfluidic System Enabling Continuous Quantification of Specific Membrane Capacitance and Instantaneous Young’s Modulus of Single Cells   赵阳，陈德勇, 罗亚娜,陈峰,赵晓婷*,江妹*,岳文涛*,龙荣*,王军波,陈健   2014-10-26
（80）On-Chip Culture of Osteocytes   卫超，陈德勇,卫元晨,游莉丹*,王军波,陈健   2014-10-26
（81）Tumor Cell Classification Based on Instantaneous Young’s Modulus Using Constriction Channel based Microfluidic Devices   罗亚娜，陈德勇,赵阳,卫超,赵晓婷*,岳文涛*,龙荣*,王军波,陈健   2014-10-26
（82）Non-invasive Wireless And Passive MEMS Intraocular Pressure Sensor Based on Flexible Substrate    刘丽娟,王军波,陈德勇,陈健   2014-10-23
（83）MEMS眼压传感器研究进展综述   第十三届全国敏感元件与传感器学术会议   王军波，刘丽娟，陈德勇，陈健   2014-10-11
（84）电化学振动传感器   第十三届全国敏感元件与传感器学术会议   张正宇，王军波，陈德勇，何文涛，龚黎明   2014-10-10
（85）High-Q Resonant Pressure Sensor with Through-glass Electrical Interconnect Based on SOI wafer Technology   罗振宇，陈德勇，王军波   2014-08-31
（86）Gold Pattern on Highly Topographic Surface with Though-Silicon-Holes for Wire Interconnection Using Electrochemical Method   谢波，王军波，陈德勇,罗振宇，   2014-08-31
（87）The Study of Bandwidth Expansion Based on Electrochemical Vibration Sensor   张正宇，王军波，陈德勇，李忆南   2014-08-31
（88）On-Chip Tubing-Free Culture of Vascular Smooth Muscle Cells   卫元晨，陈峰*,张韬*,陈德勇,贾鑫*,王军波,郭伟*,陈健   2014-08-28
（89）Microfluidic Platform Enabling Tumor Cell Characterization and Classification Based on Specific Membrane Capacitance and Cytoplasm Conductivity   赵阳,赵晓婷,陈德勇,罗亚娜,江妹,岳文涛,王军波,陈健   2014-05-27
（90）Constriction Channel Based Microfluidic Systems Enabling Single-Cell Instantaneous Young’s Modulus Measurement In a Continuous Manner   罗亚娜，陈德勇,赵阳,卫超,赵晓婷,岳文涛,龙荣,王军波,陈健   2014-05-27
（91）Resonant Pressure Sensor with Through-glass Electrical Interconnect Based on SOI wafer Technology   罗振宇，陈德勇，王军波   2014-04-13
（92）Control System for an Electromagnetic Vibrating Ring Gyroscope   Jili Liu   2013-11-07
（93）A SOI-MEMS Based Resonant Barometric Pressure Sensor with Differential Output   中国微米纳米技术学会第十五届学术年会   Zhenyu Luo   2013-11-07
（94）A Wireless Power-Free Pressure Sensor for Real-Time In Vivo Gastrointestinal Pressure Monitoring   中国微米纳米技术学会第十五届学术年会   Qiang Shi   2013-11-07
（95）A Differential Resonant Barometric Pressure Sensor Using SOI-MEMS Technology    Zhenyu Luo   2013-11-04
（96）A Readout Circuit for Wireless Passive Resonant-Circuit Sensors   Kaikai Bao   2013-11-04
（97）Extending upper cutoff frequency of electrochemical seismometer by usting extremely thin su8 insulating spacers   Wentao he   2013-11-04
（98）Cell type classification based on specific membrane capacitance and cytoplasm conductivity using microfluidic devices   Yang Zhao   2013-10-27
（99）A MEMS based electrochemical seismic sensor   Tao Deng, et al   2013-06-09
（100）A microfluidic device capable of continuous quantification of single-cell specific membrane capacitance and cytoplasm conductivity   Yang Zhao, et al   2013-06-05
（101）An electrostatically-driven and capacitively-sensed differential lateral resonant pressure microsensor   Bo Xie   2013-04-07
（102）A microfluidic system enabling continuous characterization of single-cell specific membrane capacitance and cytoplasm conductivity   Yang Zhao   2013-04-07
（103）An Electrostatically Driven - Capacitively Sensed Silicon Resonator Based on SOI- MEMS Technology   Hailong Jiao   2012-11-04
（104）The Characteristics of MEMS Based Seismic Sensors Using the Electrochemical Approach   Yunjie Fan   2012-11-04
（105）A wireless and power-free micro sensor enabling gastrointestinal pressure monitoring   Qiang Shi, Junbo Wang, Deyong Chen, Jian Chen   2012-10-29
（106）A differential resonant accelerometer fabricated by SOI-MEMS technology   Yanlong Shan, Junbo Wang, Deyong Chen   2012-07-11
（107）Sensors and Systems based on MEMS technology   Junbo Wang   2012-07-06
（108）A Novel Micromachined Differential Resonant Accelerometer With Flexual Mechanisms Fabricated by SOI-MEMS Technology   商艳龙，王军波，涂晟，陈德勇   2011-10-28
（109）A Novel Micromachined Viscosity and Density Sensor Based on Resonant Torsional Paddle   李浩，王军波，李翔，陈德勇   2011-10-28
（110）Micro-machined resonant accelerometer with high sensitivity   王军波，商艳龙，涂晟，刘磊，陈德勇   2011-02-19
（111）A novel biosensor based on electromagnetic pendulous resonator for direct liquid detection   王军波，李浩，李翔，陈德勇   2011-02-19
（112）An electrostatically actuated micromachined vibrating ring gyroscope with highly symmetric support beams   陈德勇，张明，王军波   2010-11-01
（113）Design and experiment of a laterally driven micromachined resonant pressure sensor for barometers   陈德勇，李玉欣，刘猛，王军波   2010-09-05
（114）A micro-machined vibrating ring gyroscope with highly symmetric structure for harsh environment   王军波，陈李，张明，陈德勇   2010-01-20

   

与英国卢瑟福国家实验室、德国明斯特大学、法国巴黎高等师范学院合作承担欧盟第七框架人员交换国际合作项目；与台湾长庚大学合作承担院“台湾青年学者计划”项目；与加拿大多伦多大学合作承担国家自然科学基金中加国际合作项目。

已指导硕士研究生和博士研究生50余名，其中多名研究生获中科院百篇优秀博士学位论文、院长特别奖、院长优秀奖、优秀毕业生、国家奖学金、顶秀奖学金、三好学生标兵、三好学生干部、三好学生等奖励。毕业学生就业去向包括出国深造、高等学校、国家机关、国家级研究机构、外企、大型国企等。