先进技术节点CMOS关键工艺与器件架构，超陡亚阈值摆幅低功耗器件，电子自旋/能谷相关新型量子器件，纳米器件中的热电效应与探测，先进TCAD仿真技术与应用。

每年计划招收硕士研究生1名，博士研究生(包括直博)1名。同时欢迎优秀本科生进组开展科研实习。

080903-微电子学与固体电子学
080901-物理电子学

FinFET, Nanowire FET, 新原理低功耗CMOS架构与关键技术
低维介观系统中电荷/自旋量子输运特性
深度学习方法与半导体器件TCAD仿真

2006-09--2011-07   中国科学院半导体研究所   博士
2002-09--2006-07   南京大学   学士

集成电路制造工艺与研究方法

2016年度，中国科学院海外人才引进项目。

（1） 中国科学院大学优秀本科生指导教师, 研究所（学校）, 2019

[1] 张青竹, 殷华湘, 曹磊, 张兆浩, 顾杰, 田佳佳, 李俊杰, 姚佳欣, 李永亮, 张永奎, 吴振华, 赵鸿滨, 罗军, 王文武, 屠海令, 叶甜春. 一种半导体器件的制备方法及半导体器件. CN: CN114005826A, 2022-02-01.
[2] 甘维卓, 吴振华, 许高博, 李俊杰, 殷华湘, 郭鸿. 冷源MOS晶体管及制作方法. CN: CN113745314A, 2021-12-03.
[3] 罗彦娜, 殷华湘, 吴振华, 张青竹, 曹磊. 一种CFET结构、其制备方法以及应用其的半导体器件. CN: CN113206090A, 2021-08-03.
[4] 张青竹, 殷华湘, 曹磊, 张兆浩, 田佳佳, 顾杰, 李俊杰, 姚佳欣, 李永亮, 张永奎, 吴振华, 赵鸿滨, 罗军, 王文武, 屠海令, 叶甜春. 一种Z 2 -FET器件及其制备方法、一种半导体器件. CN: CN113178489A, 2021-07-27.
[5] 顾杰, 殷华湘, 张青竹, 张兆浩, 吴振华. 一种量子点器件及其制备方法. CN: CN113109974A, 2021-07-13.
[6] 张亚东, 刘战峰, 吴振华, 殷华湘. 一种晶圆级二维材料的转移方法及器件制备方法. CN: CN113035781A, 2021-06-25.
[7] 吴振华, 甘维卓, 张兆浩, 张永奎, 李俊杰, 殷华湘, 朱慧珑, 郭鸿. 一种半导体器件及其制造方法、集成电路、电子设备. CN: CN112652664A, 2021-04-13.
[8] 张青竹, 殷华湘, 闫江, 吴振华. 半导体器件及其制作方法. CN: CN107068769B, 2020-12-08.
[9] 李永亮, 都安彦, 吴振华, 李超雷, 王文武. 一种半导体器件及其制作方法及包括该器件的电子设备. CN: CN110224029A, 2019-09-10.
[10] 李俊杰, 李永亮, 周娜, 杨涛, 张青竹, 王桂磊, 李俊峰, 吴振华, 殷华湘, 朱慧珑, 王文武. 纳米线、纳米线围栅器件以及纳米孔筛的制备方法. CN: CN110164762A, 2019-08-23.
[11] 吴振华, 李俊杰, 郭鸿, 甘维卓, 殷华湘, 朱慧珑, 王文武. 半导体器件和制作方法. CN: CN110061060A, 2019-07-26.
[12] 吴振华, 李俊杰, 郭鸿, 甘维卓",null,null,"王文武. 半导体器件和制作方法. CN: CN110061060A, 2019-07-26.
[13] 李俊杰, 王桂磊, 李永亮, 周娜, 杨涛, 傅剑宇, 李俊峰, 吴振华, 殷华湘, 朱慧珑, 王文武. 选择性刻蚀方法及纳米针尖结构的制备方法. CN: CN110002393A, 2019-07-12.
[14] 甘维卓, 张永奎, 李俊杰, 吴振华, 郭鸿, 殷华湘, 朱慧珑, 王文武. 冷源结构MOS晶体管及其制作方法. CN: CN109920842A, 2019-06-21.
[15] 吴振华, 郭鸿, 李俊杰. MOS器件的制作方法. CN: CN109712892A, 2019-05-03.
[16] 李俊杰, 吴振华, 李永亮, 周娜, 张青竹, 王桂磊, 李俊峰, 王文武. 环栅纳米线晶体管及其制备方法. CN: CN109599335A, 2019-04-09.
[17] 朱慧珑. 半导体器件及其制造方法及包括该器件的电子设备. CN: CN109326650A, 2019-02-12.
[18] 李俊杰, 吴振华, 张青竹, 王文武. 包括纳米线的器件与其制作方法. CN: CN108878422A, 2018-11-23.
[19] 李俊杰, 吴振华, 李永亮, 唐波, 王红丽, 王文武. 一种纳米线沟道制作方法. CN: CN108807149A, 2018-11-13.
[20] 李俊杰, 吴振华, 张丹, 罗军, 王文武. 一种纳米线的制作方法. CN: CN108807170A, 2018-11-13.
[21] 张青竹, 殷华湘, 闫江, 吴振华, 周章渝, 秦长亮, 张严波, 张永奎. 半导体器件及其制作方法. CN: CN108735608A, 2018-11-02.
[22] 殷华湘, 顾杰, 张青竹, 许高博, 吴振华. 量子点器件及其制作方法. CN: CN108417635A, 2018-08-17.
[23] 张青竹, 殷华湘",null,"吴振华. 半导体器件及其制作方法. CN: CN107068769A, 2017-08-18.
[24] 张青竹, 殷华湘, 闫江, 吴振华, 周章渝, 秦长亮, 张严波, 张永奎. 半导体器件及其制作方法. CN: CN103311284B, 2015-11-25.

   

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[16] Lin, Liangzhong, Zhu, Jiaji, Zhang, Dong, Wu, Zhenhua. Spin-polarized charge transport through a single barrier in HgTe/CdTe heterostructure interface. SOLID STATE COMMUNICATIONS[J]. 2022, 350: http://dx.doi.org/10.1016/j.ssc.2022.114772.
[17] Wang, Zhen, Li, Xiaojing, Wu, Zhenhua. Electronic and optical properties of the edge states in phosphorene quantum rings. APPLIED SURFACE SCIENCE[J]. 2021, 541: http://dx.doi.org/10.1016/j.apsusc.2020.148317.
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[22] Zhang, Yadong, Sun, Xiaoting, Jia, Kunpeng, Yin, Huaxiang, Luo, Kun, Yu, Jiahan, Wu, Zhenhua. Enhancement of InSe Field-Effect-Transistor Performance against Degradation of InSe Film in Air Environment. NANOMATERIALS[J]. 2021, 11(12): http://dx.doi.org/10.3390/nano11123311.
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（1） <科学>杂志精选论文, 科学出版社, 2008-05, 第 5 作者

   

（ 1 ） 高迁移率二维料铟硒及其异质结构的物性、量子输运性质调控和器件应用研究, 主持, 国家级, 2018-01--2021-12
（ 2 ） 半导体二维原子晶体材料的制备与器件特性, 参与, 国家级, 2016-07--2021-06
（ 3 ） 亚10纳米工艺节点CMOS架构材料可行性方案的探索研究, 主持, 市地级, 2016-06--2018-12
（ 4 ） 新型二维材料纳米微结构中电荷输运的介观调控, 主持, 市地级, 2016-06--2017-07
（ 5 ） 亚10纳米工艺节点CMOS path finding PDK 先导研究, 主持, 部委级, 2016-06--2018-12
（ 6 ） 10纳米 FinFET path finding 研究, 主持, 国家级, 2016-06--2020-12
（ 7 ） 亚5纳米工艺节点超低功耗高性能半导体器件探索研究, 主持, 部委级, 2019-09--2021-08
（ 8 ） 超陡亚阈值摆幅低功耗新原理器件, 主持, 省级, 2018-08--2019-08
（ 9 ） 超薄ZrO2栅介质NC-FinFET及其可靠性研究, 参与, 国家级, 2020-01--2023-12
（ 10 ） 先进工艺节点器件与单元电路协同优化研究, 主持, 部委级, 2018-12--2021-06
（ 11 ） 集成电路核心器件先进仿真方法和TCAD工具研究, 主持, 部委级, 2021-01--2023-12

现指导学生

刘建华  博士研究生  080903-微电子学与固体电子学  

甘维卓  博士研究生  080903-微电子学与固体电子学  

李仕信  硕士研究生  080903-微电子学与固体电子学  

徐浩清  硕士研究生  080903-微电子学与固体电子学  

霍嘉丽  博士研究生  080903-微电子学与固体电子学  

徐丽君  博士研究生  080903-微电子学与固体电子学  

占国慧  博士研究生  080903-微电子学与固体电子学  

狄兆海  硕士研究生  085400-电子信息  

时玉坤  硕士研究生  085400-电子信息